['Air Programs']

['Greenhouse Gases']

12/18/2024

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Topic Search
Air Programs - Greenhouse Gases

Table I-8 to Subpart I of Part 98—Default Emission Factors (1-UN2O j) for N2O Utilization (UN2O j)

RegSense Greenhouse Gases CFR Regulations Environmental Protection Agency (EPA)Focus Area USA English Air Programs CFR Appendix

Table I-8 to Subpart I of Part 98—Default Emission Factors (1-UN ₂ O _,j) for N ₂ O Utilization (UN ₂ O _,j)
Manufacturing type/process type/wafer size	N ₂ O
Semiconductor Manufacturing:
200 mm or Less:
CVD 1-U _i	1.0
Other Manufacturing Process 1-U _i	1.0
300 mm or greater:
CVD 1-U _i	0.5
Other Manufacturing Process 1-U _i	1.0
LCD Manufacturing:
CVD Thin Film Manufacturing 1-U _i	0.63
All other N ₂ O Processes	1.0

[75 FR 74831 Dec. 1, 2010; 89 FR 31921, Apr. 25, 2024]

['Air Programs']

['Greenhouse Gases']

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