['Air Programs']

['Greenhouse Gases']

05/22/2023

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Table I–6 to Subpart I of Part 98—Default Emission Factors (1–Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for LCD Manufacturing

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Table I–6 to Subpart I of Part 98—Default Emission Factors (1–Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for LCD Manufacturing

Table I-6 To Subpart I of Part 98—Default Emission Factors (1-U_ij) for Gas Utilization Rates (U_ij) and By-Product Formation Rates (B_ijk) for LCD Manufacturing
CVD Chamber Cleaning 1-U_i	NA	NA	NA	NA	NA	NA	0.03	0.3	0.9
Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type.
Process type factors	Process gas i
Process type factors	CF₄	C₂F₆	CHF₃	CH₂F₂	C₃F₈	c− C₄F₈	NF₃ Remote	NF₃	SF₆
Etch 1-U_i	0.6	NA	0.2	NA	NA	0.1	NA	NA	0.3
Etch BCF₄	NA	NA	0.07	NA	NA	0.009	NA	NA	NA
Etch BCHF₃	NA	NA	NA	NA	NA	0.02	NA	NA	NA
Etch BC₂F₄	NA	NA	0.05	NA	NA	NA	NA	NA	NA

[75 FR 74831, Dec. 1, 2010; 78 FR 68225, Nov. 13, 2013; 80 FR 12934, March 12, 2015]

['Air Programs']

['Greenhouse Gases']

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