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Table I-2 to Subpart I of Part 98—Examples of Fluorinated GHGs and Fluorinated Heat Transfer Fluids Used by the Electronics Industry

RegSenseGreenhouse GasesCFR RegulationsEnvironmental Protection Agency (EPA)Focus AreaUSAEnglishAir ProgramsCFR Appendix

Examples of Fluorinated GHGs and Fluorinated Heat Transfer Fluids Used by the Electronics Industry
Product type Fluorinated GHGs and fluorinated heat transfer fluids used during manufacture
Electronics CF4, C2F6, C3F8, c-C4F8, c-C4F8O, C4F6, C5F8, CHF3, CH2F2, NF3, SF6, and fluorinated HTFs (CF3-(O-CF(CF3)-
CF2)n-(O-CF2)m-O-CF 3, CnF2n 2, CnF2n 1(O)CmF2m 1, CnF2nO, (CnF2n 1)3N).
['Air Programs']
['Greenhouse Gases']
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