['Air Programs']

['Greenhouse Gases']

12/18/2024

HOME NEWS REGSENSE INSTITUTE EDGE EXPERT HELP EVENTS FORUMS

FREE TRIAL UPGRADE!

Thank you for investing in EnvironmentalHazmatHuman ResourcesHuman Resources, Hazmat & Environmental related content. Click 'UPGRADE' to continue.

CANCEL

UPGRADE

YOU'RE ALL SET!

Enjoy your limited-time access to the Compliance Network!

A confirmation welcome email has been sent to your email address from ComplianceNetwork@t.jjkellercompliancenetwork.com. Please check your spam/junk folder if you can't find it in your inbox.

CONTINUE

YOU'RE ALL SET!

Thank you for your interest in EnvironmentalHazmatHuman ResourcesHuman Resources, Hazmat & Environmental related content.

CONTINUE

WHOOPS!

You've reached your limit of free access, if you'd like more info, please contact us at 800-327-6868.

By signing in for J. J. Keller® Compliance Network, you agree to the J. J. Keller® Terms of Use . For information about how we use any personal information we collect for our own purposes, please review our Notice at Collection .

Your Compliance Network account is no longer active, please call support at 1-833-982-1232 option 3, to reactivate your account.

There is no account associated with this email.

Your Compliance Network account will use the same sign in credentials as the following J.J. Keller sites. Please enter the same password you use to access:
Please note: Any changes to your credentials will affect all products.
Contact Support at 1-833-982-1232 or compliancenetwork@jjkeller.com

Password

To enhance your account's security, you need to confirm your email address and reset your password.

To reset your password, enter the 6-digit verification code sent to csquires@jjkeller.com.

* Field cannot be blank

If you don't see the email in your inbox, please check your spam folder.

Password

Re-enter Password

Secure password tips:

Password is case sensitive.
Use at least 12 characters.
Use at least one upper and one lower case letter.
Use at least 1 number.
Password may contain special characters: ! @ # $ % ^ & * ( ) ... - + = { }
Your password cannot be any of the last 4 passwords.
Password expires every 365 days.

You already have a Compliance Network account, please sign in.

test@email.com

Your Compliance Network account will use the same sign in credentials as the following J.J. Keller sites. Please enter the same password you use to access:
Please note: Any changes to your credentials will affect all products.
Contact Support at 1-833-982-1232 or compliancenetwork@jjkeller.com

Password

To enhance your account's security, you need to confirm your email address and reset your password.

To reset your password, enter the 6-digit verification code sent to csquires@jjkeller.com.

* Field cannot be blank

If you don't see the email in your inbox, please check your spam folder.

Your Compliance Network account will use the same sign in credentials as the following J.J. Keller sites. Please enter the same password you use to access:
Please note: Any changes to your credentials will affect all products.
Contact Support at 1-833-982-1232 or compliancenetwork@jjkeller.com

To proceed with setting up your Compliance Network trial, you need to reset your J. J. Keller password. Please select ‘Reset Password’ to continue.

Password

Re-enter Password

Secure password tips:

Password is case sensitive.
Use at least 12 characters.
Use at least one upper and one lower case letter.
Use at least 1 number.
Password may contain special characters: ! @ # $ % ^ & * ( ) ... - + = { }
Your password cannot be any of the last 4 passwords.
Password expires every 365 days.

Your Compliance Network account is no longer active, please call support at 1-833-982-1232 option 3, to reactivate your account.

We are unable to authenticate your J. J. Keller account. Please contact support at 1-833-982-1232 for assistance with creating your trial.

Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing

...

Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing

RegSense Greenhouse Gases CFR Regulations Environmental Protection Agency (EPA)Focus Area USA English Air Programs CFR Appendix

Table I-16 to Subpart I of Part 98—Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing
Manufacturing type/process type/gas	Default DRE (%)
MEMS, LCDs, and PV Manufacturing	60
Semiconductor Manufacturing:
CF ₄	87
CH ₃ F	98
CHF ₃	97
CH ₂ F ₂	98
C ₄ F ₈	93
C ₄ F ₈ O	93
C ₅ F ₈	97
C ₄ F ₆	95
C ₃ F ₈	98
C ₂ HF ₅	97
C ₂ F ₆	98
SF ₆	95
NF ₃	96
All other carbon-based fluorinated GHGs used in Semiconductor Manufacturing	60
N ₂ O Processes
CVD and all other N ₂ O-using processes	60

[78 FR 68234, Nov. 13, 2013; 89 FR 31922, Apr. 25, 2024]

['Air Programs']

['Greenhouse Gases']

About Notice at Collection Terms of Use Do Not Sell or Share My Personal Information Accessibility Support

J. J. Keller is the trusted source for DOT / Transportation, OSHA / Workplace Safety, Human Resources, Construction Safety and Hazmat / Hazardous Materials regulation compliance products and services. J. J. Keller helps you increase safety awareness, reduce risk, follow best practices, improve safety training, and stay current with changing regulations.

VISIT J. J. KELLER.COM

Connect With Us