['Air Programs']

['Greenhouse Gases']

12/27/2024

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Air Programs - Greenhouse Gases

Table I–12 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for use with the Stack Test Method (300 mm and 450 mm wafers)

RegSense Greenhouse Gases CFR Regulations Environmental Protection Agency (EPA)Focus Area USA English Air Programs CFR Appendix

Table I-12 to Subpart I of Part 98—Default Emission Factors (1-U _ij) for Gas Utilization Rates (U _ij) and By-Product Formation Rates (B _ijk) for Semiconductor Manufacturing for Use With the Stack Test Method
All processes	Process gas i
All processes	CF ₄	C ₂ F ₆	CHF ₃	CH ₂ F ₂	CH ₃ F	C ₃ F ₈	C ₃ F ₈ Remote	C ₄ F ₈	NF ₃	NF ₃ Remote	SF ₆	C ₄ F ₆	C ₅ F ₈	C ₄ F ₈ O
1-U _i	0.65	0.80	0.37	0.20	0.30	0.30	0.063	0.183	0.19	0.018	0.30	0.15	0.100	NA
BCF ₄	NA	0.21	0.076	0.060	0.029	0.21	NA	0.045	0.040	0.037	0.033	0.059	0.109	NA
BC ₂ F ₆	0.058	NA	0.058	0.043	0.0093	0.18	NA	0.027	0.0204	NA	0.041	0.062	0.083	NA
BC ₄ F ₆	0.0083	NA	0.01219	NA	0.001	NA	NA	0.008	NA	NA	NA	NA	NA	NA
BC ₄ F ₈	0.0046	NA	0.00272	0.054	0.007	NA	NA	NA	NA	NA	NA	0.0051	NA	NA
BC ₃ F ₈	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	NA	0.00012	NA
BCH ₂ F ₂	0.005	NA	0.0024	NA	0.0033	NA	NA	0.0021	0.00034	0.00088	0.000020	0.000030	NA	NA
BCH ₃ F	0.0061	NA	0.027	0.0036	NA	0.0007	NA	0.0063	0.0036	0.0028	0.0082	0.00065	NA	NA
BCHF ₃	0.012	NA	NA	0.057	0.016	0.012	NA	0.028	0.0106	0.000059	0.0039	0.017	0.0069	NA
BF ₂	NA	NA	NA	NA	NA	NA	NA	NA	NA	0.50	NA	NA	NA	NA

[78 FR 68230, Nov. 13, 2013; 89 FR 31922, Apr. 25, 2024]

['Air Programs']

['Greenhouse Gases']

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