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Table I–11 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for use with the Stack Test Method (150 mm and 200 mm wafers)

RegSenseGreenhouse GasesCFR RegulationsEnvironmental Protection Agency (EPA)Focus AreaUSAEnglishAir ProgramsCFR Appendix



[78 FR 68229, Nov. 13, 2013]

['Air Programs']
['Greenhouse Gases']
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