['Air Programs']
['Greenhouse Gases']
05/22/2023
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| Emission factors EFi | ||||||
| Product type | CF4 | C2F6 | CHF3 | C3F8 | NF3 | SF6 |
| Semiconductors (kg/m2) | 0.90 | 1.00 | 0.04 | 0.05 | 0.04 | 0.20 |
| LCD (g/m2) | 0.50 | NA | NA | NA | 0.90 | 4.00 |
| MEMS (kg/m2) | NA | NA | NA | NA | NA | 1.02 |
Notes: NA denotes not applicable based on currently available information.
[75 FR 74829, Dec. 1, 2010; 78 FR 68221, Nov. 13, 2013]
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