['Air Programs']
['Greenhouse Gases']
12/27/2024
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...
| Notes: NA denotes not applicable based on currently available information. | ||||||||
| Product type | Emission factors EF i | |||||||
| CF4 | C2 F6 | CHF3 | c-C4 F8 | C3 F8 | NF3 | SF6 | N2 O | |
| Semiconductors (kg/m 2) | 0.9 | 1.0 | 0.04 | NA | 0.05 | 0.04 | 0.20 | NA |
| LCD (g/m 2) | 0.65 | NA | 0.0024 | 0.00 | NA | 1.29 | 4.14 | 17.06 |
| MEMS (kg/m 2) | 0.015 | NA | NA | 0.076 | NA | NA | 1.86 | NA |
[75 FR 74829, Dec. 1, 2010; 78 FR 68221, Nov. 13, 2013; 89 FR 31919, Apr. 25, 2024]
['Air Programs']
['Greenhouse Gases']
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