FREE TRIAL UPGRADE!
Thank you for investing in EnvironmentalHazmatHuman ResourcesHuman Resources, Hazmat & Environmental related content. Click 'UPGRADE' to continue.
CANCEL
YOU'RE ALL SET!
Enjoy your limited-time access to the Compliance Network!
A confirmation welcome email has been sent to your email address from ComplianceNetwork@t.jjkellercompliancenetwork.com. Please check your spam/junk folder if you can't find it in your inbox.
YOU'RE ALL SET!
Thank you for your interest in EnvironmentalHazmatHuman ResourcesHuman Resources, Hazmat & Environmental related content.
WHOOPS!
You've reached your limit of free access, if you'd like more info, please contact us at 800-327-6868.
CLOSE
 
 

...

Technology CF4 slope coefficient [(kg CF4/metric ton Al)/ AE-Mins/cell-day)] CF4 overvoltage coefficient [(kg CF4/metric ton Al)/ (mV)] Weight fraction C2F6/CF4 [(kg C2F6/kg CF4)]
Center Worked Prebake (CWPB) 0.143 1.16 0.121
Side Worked Prebake (SWPB) 0.272 3.65 0.252
Vertical Stud Søderberg (VSS) 0.092 NA 0.053
Horizontal Stud Søderberg (HSS) 0.099 NA 0.085

[74 FR 56417 Oct. 30, 2009; 75 FR 79156 Dec. 17, 2010]

['Air Programs']
['Greenhouse Gases']
Load More